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US 2015/0317783 A1Published application
Inspection Apparatus
AssigneeHSEB Dresden GmbH
InventorBernd SROCKA
Life of this patent
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AssigneeHSEB Dresden GmbH
InventorBernd SROCKA
Estimating the term…
An apparatus for inspecting flat objects, in particular wafers, containing an object holder, a camera arrangement having a camera for recording an image of at least one part of the object; and a drive arrangement for producing a relative movement between the camera arrangement and the object from a first recording position to at least one further recording position; is characterized in that the camera arrangement has at least one further camera; the object areas imaged in different cameras are at least partially different, wherein all cameras together simultaneously record only part of the total inspection area of the object; and each object point of the entire inspection area can be imaged at least once in one of the cameras as a result of the relative movement between the camera arrangement and the object, as produced with the drive arrangement.
Device for inspection of flat objects (20), in particular wafers, comprising
Device according to any of the preceding claims, characterized in that each camera (16) of the camera assembly (14) is provided with its own imaging optical assembly (18) and its own detector.
Device according to any of the preceding claims, characterized in that the images are essentially telecentric.
Device according to any of the preceding claims, characterized in that one or more color- and or infrared filters are provided in the imaging paths of light.
Device according to any of the preceding claims, characterized in that one or ore color- and/or infrared filters are provided in the illumination paths of light.
Method for inspection of flat objects (20), in particular wafers, comprising the steps of
Device for the inspection of flat objects, in particular wafers (20) comprising
Method for inspection of flat objects (20), in particular wafers, with the steps taking images of object ranges with a camera (16) and generating a relative movement between the camera (16) and the object (20) from a first imaging position to at least one further suitable imaging position, characterized in that the camera (16) is provided with a plurality of detector elements (Pixels) and the object holder (12), the sensor chips with the detector elements inside the camera (16) or the entire camera are shiftable in the object plane by a distance, where a multiple of such distance corresponds to the length of the detector elements in the direction of the shifting distance.
Dependencies are inferred from the claim text.