Gas pressure controller

A gas pressure controller comprising:

• an insulating substrate having a gas inlet and a gas outlet, and including an inner channel, the insulating substrate being a stacked body formed from a plurality of insulating substrate layers;
• a valve mechanism including an MEMS valve element that is attached directly on a front surface or a back surface of the insulating substrate and that is connected to the inner channel via a port communicating with the inner channel;
• a pressure sensor section including an MEMS pressure sensor element that is attached directly to the front surface or the back surface of the insulating substrate and that is connected to the inner channel via a port communicating with the inner channel;
• and
• a control section for feedback-controlling the valve mechanism based on a detection signal of the pressure sensor section,
• wherein a metal layer for electrical connection is formed on at least one of the front surface, the back surface and an inner joining surface of the insulating substrate.