Reducing pilot runs of run-to-run control in a manufacturing facility
AssigneeApplied Materials, Inc.
InventorJianping Zou
Life of this patent
Estimating the term…
Abstract
A system and method for reducing pilot runs of run-to-run control in a manufacturing facility calculates an unbiased estimation of an independent model intercept based on a state space model associated with the manufacturing facility. A determination is made as to whether to perform a pilot run in the manufacturing facility. Upon determining that the run is to be performed, an indication that the pilot run is to be performed is generated. Pilot run data is received in response to the pilot run being performed, and the state space model is updated based on the received data.
Claims20
A method comprising:
- calculating, using a processing device, an unbiased estimation of a plurality of independent model intercepts based on a state space model associated with a manufacturing facility;
- determining whether to perform a pilot run in the manufacturing facility;
- upon determining that the pilot run is to be performed, generating an indication that the pilot run is to be performed;
- receiving pilot run data in response to the pilot run being performed;
- and
- updating the state space model based on the received pilot run data.
A system comprising:
- a processing device to:
- calculating, using a processing device, an unbiased estimation of a plurality of independent model intercepts based on a state space model associated with a manufacturing facility;
- determining whether to perform a pilot run in the manufacturing facility;
- generate an indication that the pilot run is to be performed upon determining that the pilot run is to be performed;
- receive pilot run data in response to the pilot run being performed;
- and
- update the state space model based on the received pilot run data.
A non-transitory computer-readable storage medium storing instructions which, when executed, cause a processing device to perform the operations of:
- calculating, using a processing device, an unbiased estimation of a plurality of independent model intercepts based on a state space model associated with a manufacturing facility;
- determining whether to perform a pilot run in the manufacturing facility;
- upon determining that the pilot run is to be performed, generating an indication that the pilot run is to be performed;
- receiving pilot run data in response to the pilot run being performed;
- and
- updating the state space model based on the received pilot run data.
The non-transitory computer-readable storage medium of 17, wherein calculating the unbiased estimation of the independent model intercept comprises:
- estimating a delta offset, corresponding to the equipment maintenance, for each of the plurality of independent model intercepts, wherein each delta offset corresponds to a difference in the delta offset's respective independent model intercept before and after the equipment maintenance was performed;
- and
- updating the state space model based on the estimated delta offset.
The non-transitory computer-readable storage medium of 16 storing further instructions which, when executed, cause the processing device to perform the operations of:
- determining that a new product has been added to the manufacturing facility;
- determining a new independent model offset corresponding to the new product, wherein the new independent model offset corresponds to a new state;
- and
- updating the state space model to include the new state.
The non-transitory computer-readable storage medium of 19 storing further instructions which, when executed, cause the processing device to perform the operations of:
- performing a state estimation based on the received pilot run data;
- and
- estimating a delta offset based on the received pilot run data, wherein the delta offset is a difference in an independent model intercept before and after the new product was added;
- and
- updating the state space model based on the delta offset.
Dependencies are inferred from the claim text.