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US 2015/0316853 A1Published application
Support elements for an optical element
AssigneeCarl Zeiss SMT GmbH
InventorsJens Kugler, Ulrich Weber, Nicolai Wengert
Life of this patent
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Abstract
Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
Claims33
1-29. (canceled)
An optical module, comprising:
- an optical element of a microlithographic projection exposure system;
- a support unit;
- a bipod;
- and
- a lever,
- wherein:
- the bipod supports the optical element on the support unit;
- the bipod comprises two bipod braces, each of which has a first end forming a brace foot and a second end forming a brace head;
- each brace foot is connected to the support unit;
- each brace head is connected to the optical element so that at least one of the brace heads and a connecting line connecting the two brace feet span a bipod plane;
- the lever is connected to the support unit via a bearing and via a support joint;
- the lever engages one of the brace feet via a brace joint unit;
- the spacing of the brace feet along the connecting line is adjustable via movement of the lever, which is defined by the bearing;
- and
- the support joint is connected to the lever in the area of the brace joint unit.
12 more elements
Dependencies are inferred from the claim text.