Pellicle frame and process for manufacturing same

Abstract

Provided is a pellicle frame that can prevent generation of haze and reduces a surface glittering defect under irradiation with collected light, and a method of manufacturing the same. The pellicle frame is obtained by using an aluminum frame material having a structure satisfying predetermined conditions on the circle-equivalent diameters of a Mg2Si crystallized product, an AlCuMg crystallized product, an Al—Fe-based crystallized product (AlmFe or Al7Cu2Fe), and an Al2CuMg crystallized product and on the area ratios of those crystallized products each having a circle-equivalent diameter of 1 μm or more, and in addition, subjecting the aluminum frame material to anodic oxidation processing using an alkaline electrolytic solution containing as an electrolyte a predetermined organic acid salt. In addition, the method of manufacturing a pellicle frame includes: preparing an aluminum frame material having a structure as described above; and subjecting the aluminum frame material to anodic oxidation processing using an alkaline electrolytic solution containing a predetermined organic acid salt, to form an anodic oxide film.

Dependencies are inferred from the claim text.