Apodization for Pupil Imaging Scatterometry

An optical metrology apparatus comprising:

• at least one illumination source configured to provide illumination along an illumination path to illuminate a surface of a sample;
• an apodized pupil disposed along the illumination path, the apodized pupil including one or more apertures;
• and
• at least one detector configured to detect a portion of illumination scattered, reflected, or radiated along a collection path from the surface of the sample.

An optical metrology apparatus comprising:

• at least one illumination source configured to provide illumination along an illumination path to illuminate a surface of a sample;
• an apodizer disposed within a pupil plane of the illumination path, the apodizer configured to apodize illumination directed along the illumination path;
• an illumination scanner disposed along the illumination path, the illumination scanner configured to scan a surface of the sample with at least a portion of the illumination from the apodizer;
• and
• at least one detector configured to detect a portion of illumination scattered, reflected, or radiated from the surface of the sample along a collection path.