Apparatus and Method for Driving and Measuring a MEMS Mirror System

Abstract

The present invention relates to an apparatus for driving and measuring a MEMS minor system, the MEMS minor system having a mirror pivotable around an axis by a driving coil and exhibiting a resonance frequency, having a pulse generator and a measuring unit, each electrically connected to the coil. The pulse generator is preferably configured to feed a modulated pulse signal, comprised of pulses separated by intervals and having a modulation frequency different from the resonance frequency, to the coil. The measuring unit is preferably configured to measure a value of a signal output by the coil during an interval of the modulated pulse signal. In a further aspect of the invention a method is provided for driving and measuring the MEMS mirror system.

Dependencies are inferred from the claim text.