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US 2015/0316604 A1Published application
Light-emitting device test systems
AssigneeKLA-Tenor Corporation
InventorsMark MCCORD, Alan BRODIE, James GEORGE, Yu GUAN, Ralph NYFFENEGGER
Life of this patent
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Abstract
Light-emitting devices, such as LEDs, are tested using a photometric unit. The photometric unit, which may be an integrating sphere, can measure flux, color, or other properties of the devices. The photometric unit may have a single port or both an inlet and outlet. Light loss through the port, inlet, or outlet can be reduced or calibrated for. These testing systems can provide increased reliability, improved throughput, and/or improved measurement accuracy.
Claims36
A test system comprising:
- a photometric unit having a body around a cavity, wherein the body defines an inlet and an outlet;
- a conveyor that extends through the photometric unit, wherein the conveyor is disposed in the inlet and the outlet, and wherein the conveyor is configured to move continuously at one or more speeds greater than zero to convey devices through the photometric unit;
- a spectrometer connected to the photometric unit, wherein the spectrometer is configured to measure a flux of one of the devices on the conveyor in the cavity of the photometric unit;
- and
- an electrical connector configured to power one of the devices disposed on the conveyor in the cavity of the photometric unit while the conveyor is in motion.
2 more elements
A method comprising:
- continuously conveying devices on a conveyor through an inlet and an outlet of a photometric unit while at one or more speeds greater than zero;
- providing power to each of the devices on the conveyor in the photometric unit while at the one or more speeds greater than zero;
- and
- measuring a flux of each of the devices in the photometric unit.
1 more element
A test system comprising:
- an integrating sphere having a body around a cavity, wherein the body defines a port;
- a probe card configured to hold a device, wherein the probe card comprises two probes for delivering current to the device and two probes for measuring voltage across the device;
- and
- a pair of clamps configured to move toward and away from the device thereby clamping the device between them, wherein a surface of each of the clamps is partially curved to have a substantially same radius of curvature as the integrating sphere, wherein the clamps are configured to be disposed against the port of the integrating sphere, and wherein the surface of each of clamps continues a curvature of the integrating sphere when disposed against the port.
1 more element
A method comprising:
- placing a device between a pair of clamps in a loading position, wherein a surface of each of the clamps is partially curved to have a substantially same radius of curvature as the integrating sphere;
- connecting the device with a probe card, wherein the probe card comprises two probes for delivering current to the device and two probes for measuring voltage across the device;
- translating each clamp toward the device thereby securing the device between the clamps;
- translating the device to a testing position relative to an integrating sphere;
- and
- measuring a flux of the device with the integrating sphere in the testing position.
3 more elements
A test system comprising:
- an integrating sphere having a body around a cavity, wherein the body defines a port;
- a device handling system configured to hold a device, wherein the device handling system comprises a probe card;
- and
- a test mask configured to be disposed in the port of the integrating sphere, wherein the test mask has a mask body that defines a mask aperture, wherein the device is configured to be disposed in the mask aperture, wherein a surface of the test mask is at least partially curved to have a substantially same radius of curvature as the integrating sphere, and wherein the surface of the test mask continues a curvature of the integrating sphere when disposed in the port.
1 more element
A method comprising:
- placing a device between a pair of clamps of a device handling system in a loading position;
- connecting the device with a probe card, wherein the probe card comprises two probes for delivering current to the device and two probes for measuring voltage across the device;
- translating each clamp toward the device thereby securing the device between the clamps;
- translating the device to a testing position relative to a mask aperture of a test mask disposed on an integrating sphere such that the device is disposed in the mask aperture, wherein a surface of the test mask is at least partially curved to have a substantially same radius of curvature as the integrating sphere, and wherein the surface of the test mask continues a curvature of the integrating sphere when disposed in a port of the integrating sphere;
- and
- measuring a flux of the device with the integrating sphere in the testing position.
3 more elements
Dependencies are inferred from the claim text.