De-Embedding On-Wafer Devices
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiao-Tsung Yen, Chin-Wei Kuo, Ho-Hsiang Chen, Sa-Lly Liu, Yu-Ling Lin
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiao-Tsung Yen, Chin-Wei Kuo, Ho-Hsiang Chen, Sa-Lly Liu, Yu-Ling Lin
Estimating the term…
An apparatus includes three components. The first component includes a first transmission line; the second component is coupled with the first component and includes a second transmission line; and the third component electrically coupled with the first component and/or the second component. The transmission lines each include a substrate with a p-well or n-well within the substrate and a shielding layer over the p-well or n-well. The transmission lines also each include a plurality of intermediate conducting layers over the shielding layer, the plurality of intermediate conducting layers coupled by a plurality of vias. The transmission lines further each include a top conducting layer over the plurality of intermediate conducting layers.
An apparatus comprising:
The apparatus of claim 2, wherein the p-well or n-well, the shielding layer, the plurality of intermediate conducting layers, and the top conducting layer have a same width.
An apparatus comprising a plurality of devices and at least one structure for de-embedding at least one of the plurality of devices, wherein the at least one structure comprises:
An apparatus comprising:
Dependencies are inferred from the claim text.