X-ray shield grating and x-ray talbot interferometer including x-ray shield grating

An X-ray shield grating comprising:

• a plurality of partial shield gratings each including a substrate on which a plurality of recessed portions are arranged and metal that is arranged in each of the recessed portions,
• wherein each of the partial shield gratins includes a bent region that is bent in an arrangement direction in which the plurality of recessed portions are arranged,
• wherein a radius of curvature of the bent region is 200 millimeters or less,
• wherein in the bent region,
• in a case where a maximum value of a width of a region sandwiched between two adjacent recessed portions of the plurality of recessed portions is less than or equal to three times a minimum value of the width of the region sandwiched between the two adjacent recessed portions, and
• in a case where a width of the substrate in an end portion of the bent region represents a shortest distance from the end portion to the metal when the end portion is part of the substrate, and represents 0 when the end portion is part of the metal,
• the width of the substrate in the end portion of the bent region is less than or equal to three times the minimum value, and
• wherein the plurality of partial shield gratings are stacked so periodic directions of the partial shield gratins intersect each other.

A method for producing an X-ray shield grating, comprising:

• a step of cutting off at least an end portion of a substrate on which a plurality of recessed portions are arranged and metal is arranged in each of the recessed portions;
• and
• a step of bending the substrate whose end portion has been cut off, in an arrangement direction in which the plurality of recessed portions are arranged,
• wherein in the bending step, the substrate whose end portion has been cut off is bent in such a manner that at least part of the substrate whose end portion has been cut off becomes a bent region with a radius of curvature of 200 millimeters or less, and
• wherein in the bent region,
• in a case where a maximum value of a width of a region sandwiched between two adjacent recessed portions of the plurality of recessed portions is less than or equal to three times a minimum value of the width of the region sandwiched between the two adjacent recessed portions, and
• in a case where a width of the substrate in the end portion of the bent region represents a shortest distance from the end portion to the metal when the end portion is part of the substrate, and represents 0 when the end portion is part of the metal,
• in the step of cutting off the end portion,
• the end portion is cut off so the width of the substrate in the end portion of the bent region is less than or equal to three times the minimum value of the width of the region sandwiched between the two adjacent recessed portions of the plurality of recessed portions.