Systems and Methods Eliminating False Defect Detections

A method comprising:

• applying a first test with a first optical recipe to a manufactured product to identify a first set of product defect candidates;
• applying a second test with a second optical recipe to the manufactured product to identify a second set of product defect candidates, wherein the first optical recipe and the second optical recipe have different sensitivities to reflected and transmitted light;
• and
• generating a first filtered defect candidate set, the first filtered defect candidate set having only product defects found within both the first set of product defect candidates and the second set of product defect candidates.

A method comprising:

• applying a first test with a first optical recipe to a manufactured product to identify a first set of product defect candidates, the first optical recipe having a higher sensitivity to transmitted light than to reflected light;
• applying a second test with a second optical recipe to the manufactured product to identify a second set of product defect candidates, the second optical recipe having a higher sensitivity to reflected light than to transmitted light;
• and
• applying a third test with a third optical recipe to the manufactured product to identify a third set of product defect candidates, the third optical recipe having a similar sensitivity to reflected light as to transmitted light;
• and
• generating a filtered defect candidate set, the filtered defect candidate set having only product defects found within each of the first set of product defect candidates, the second set of product defect candidates and the third set of product defect candidates.