Inspection System and Inspection Illumination Device

An inspection system including:

• an inspection illumination device that applies inspection light to an inspection object;
• and an imaging device that images light reflected or scattered at the inspection object, wherein
• the inspection illumination device comprises:
• a surface light source that emits the inspection light;
• a lens that is arranged between the surface light source and the inspection object, and provides an image of the surface light source near the inspection object;
• and
• a first light shielding mask that is arranged between the surface light source and the inspection object, and forms a dark domain within an illumination solid angle of the inspection light applied to each point on the inspection object;
• and
• the imaging device has an observation solid angle, wherein
• a shape or a size of the observation solid angle is set on a basis of a shape or a size of a dark domain within the illumination solid angle of the inspection light applied from the inspection illumination device to each point on the inspection object.