Infrared detection device

A method for producing an infrared detection device, comprising at least the production of a gas detection device obtained by implementing the steps of:

• producing, in a substrate, at least one first electronic circuit for controlling and reading the gas detection device;
• depositing at least one layer of sacrificial material on the substrate;
• depositing at least one resistive layer on the layer of sacrificial material;
• etching the resistive layer and the layer of sacrificial material, forming at least one first portion of the resistive layer able to emit a first infrared radiation in a first range of wavelengths able to be absorbed by the gas or gases to detected, and at least one second portion of the resistive layer;
• producing at least a first element for thermoresistive transduction of said first infrared radiation intended to be detected, the first thermoresistive transduction element being thermally coupled to the second portion of the resistive layer;
• producing portions of electrically conductive material electrically connecting at least the first portion of the resistive layer and the first thermoresistive transduction element to the first electronic circuit;
• eliminating the layer of sacrificial material, the portions of electrically conductive material providing a mechanical holding of the first portion and second portion of the resistive layer opposite the substrate such that a distance between the first portion of the resistive layer and the substrate is substantially equal to a distance between the second portion of the resistive layer and the substrate;
• the method further comprising the production a matrix of infrared detectors obtained by implementing the steps of:
• etching the resistive layer so that it also forms a plurality of third portions of the resistive layer;
• producing a plurality of second elements for the thermoresistive transduction of a second infrared radiation in a second range of wavelengths intended to be detected, each of the second thermoresistive transduction elements being thermally coupled to one of the third portions of the resistive layer;
• producing portions of electrically conductive material electrically connecting the second thermoresistive transduction elements to a second electronic circuit for controlling and reading the matrix of infrared detectors produced in the substrate, and providing mechanical holding of the third portions of the resistive layer opposite the substrate such that a distance between each of the third portions of the resistive layer and the substrate is substantially equal to the distance between the second portion of the resistive layer and the substrate.