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US 2015/0316379 A1Published application
Mems device with improved spring system
AssigneeInvenSense, Inc.
InventorsJoseph SEEGER, Ozan ANAC
Life of this patent
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Abstract
A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction
Claims16
A MEMS device comprising:
- a proof mass system, wherein the proof mass system includes a proof mass and a transducer;
- wherein the transducer detects motion of the proof mass in a first direction in a plane in response to force;
- wherein the proof-mass moves in the plane;
- and
- a spring system comprising a first flexible element;
- a rigid element and a second flexible element;
- wherein the first flexible element;
- the rigid element and the second flexible element are disposed in the plane;
- wherein the rigid element is coupled to proof mass system via the first flexible element and the second flexible element is coupled to the rigid element, wherein the first flexible element and the second flexible element each have a longitudinal axis parallel to the first direction of motion.
6 more elements
A MEMS device comprising:
- a proof mass;
- and
- a spring system compliant in a first direction of motion, coupled to the proof mass, the spring system comprising a first flexible element;
- a rigid element coupled to the first flexible element;
- and a second flexible element coupled to the rigid element, wherein the first flexible element and the second flexible element each have a longitudinal axis parallel to the first direction of motion;
- the proof-mass and spring system are disposed in a plane;
- wherein the proof-mass moves in the first direction of motion in the plane in response to a force,
- wherein the first flexible element and the second flexible element each has a midpoint aligned along an axis perpendicular to the first direction of motion.
5 more elements
Dependencies are inferred from the claim text.