Thermoelectric Device And Method For Fabrication Thereof
AssigneeUnited Arab Emirates University
InventorMahmoud Al Ahmad
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Abstract
A thermoelectric device and a method for fabrication thereof are disclosed. The thermoelectric device includes one or more thermocouples electrically connected in series. Each thermocouple includes at least one first thermoelectric element and at least one second thermoelectric element, wherein the thermoelectric elements are maintained in a spaced apart relationship forming an internal cavity there between.
Claims20
A thermoelectric device comprising at least a first substrate and at least a second substrate arranged substantially parallel to a reference plane, said reference plane defining a first axis, a second axis, and a third axis, said axes being mutually orthogonal, wherein said first axis is orthogonal to said reference plane and said second and said third axes are aligned to said reference plane, wherein said first and said second substrates are retained in a spaced apart relationship along said first axis, and at least one thermocouple, said thermocouple comprising:
- at least one first thermoelectric element disposed on said first substrate extending towards said second substrate along said first axis, wherein said first thermoelectric element comprises a first basal surface facing towards said first substrate, a first apical surface substantially opposite to said first basal surface, and a first lateral surface there between,
- at least one second thermoelectric element disposed on said second substrate extending towards said first substrate along said first axis, wherein said second thermoelectric element comprises a second basal surface facing towards said second substrate, a second apical surface substantially opposite to said second basal surface, and a second lateral surface there between,
- wherein said first thermoelectric element and said second thermoelectric element are disposed such that said first and said second apical surfaces are spaced apart along said first axis, whereby an internal cavity is defined there between.
A method for fabricating a thermoelectric device, said method comprising:
- providing a first substrate arranged substantially parallel to a reference plane, said reference plane defining a first axis, a second axis, and a third axis, said axes being mutually orthogonal, wherein said first axis is orthogonal to said reference plane and said second and said third axes are aligned to said reference plane,
- forming at least a first thermoelectric element on said first substrate, wherein said first thermoelectric element extends along said first axis and comprises a first basal surface facing towards said first substrate, a first apical surface substantially opposite to said first basal surface, and a first lateral surface there between,
- disposing a sacrificial layer on said first thermoelectric element,
- forming at least a second thermoelectric element on said sacrificial layer, wherein said second thermoelectric element extends along said first axis and comprises a second basal surface facing away from said first substrate, a second apical surface substantially opposite to said second basal surface and facing towards said sacrificial layer, and a second lateral surface there between,
- disposing a second substrate on said second thermoelectric element such that said second substrate is retained in a spaced apart relationship from said first substrate along said first axis and extends in a spatial plane substantially parallel to said reference plane, and
- removing said sacrificial layer such that said first and said second apical surfaces of said first thermoelectric element and said second thermoelectric element respectively are spaced apart along said first axis, whereby an internal cavity is defined there between,
- whereby at least one thermocouple is formed between said first and said second substrates.
Dependencies are inferred from the claim text.