Display device and manufacturing method thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei YAMAZAKI, Mitsuaki OSAME
Life of this patent
Estimating the term…
Abstract
It is an object of the present invention to prevent an influence of voltage drop due to wiring resistance, trouble in writing of a signal into a pixel, and trouble in gray scales, and provide a display device with higher definition, represented by an EL display device and a liquid crystal display device. In the present invention, a wiring including Cu is provided as an electrode or a wiring used for the display device represented by the EL display device and the liquid crystal display device. Besides, sputtering is performed with a mask to form the wiring including Cu. With such structure, it is possible to reduce the voltage drop and a deadened signal.
Claims22
(canceled)
A display device comprising:
- a first insulating layer;
- a semiconductor layer over the first insulating layer;
- a gate insulating layer over the semiconductor layer;
- a gate electrode over the gate insulating layer;
- a second insulating layer over the gate electrode;
- and
- a third insulating layer comprising organic material over the second insulating layer;
- wherein the gate electrode comprises a first layer comprising titanium and a second layer comprising copper,
- wherein the second layer is over and in contact with the first layer, and
- wherein the third insulating layer comprises a rounded portion.
A display device comprising:
- a first insulating layer;
- a semiconductor layer over the first insulating layer;
- a gate electrode adjacent to the semiconductor layer with a gate insulating layer interposed therebetween;
- a second insulating layer over the gate electrode;
- and
- a third insulating layer comprising organic material over the second insulating layer;
- wherein the gate electrode comprises a first layer comprising titanium and a second layer comprising copper,
- wherein the second layer is over and in contact with the first layer, and
- wherein the third insulating layer comprises a rounded portion.
A display device comprising:
- a first insulating layer;
- a semiconductor layer over the first insulating layer;
- a gate insulating layer over the semiconductor layer;
- a gate electrode over the gate insulating layer;
- a second insulating layer over the gate electrode;
- a third insulating layer comprising organic material over the second insulating layer;
- and
- a source electrode or a drain electrode over the semiconductor layer,
- wherein the gate electrode comprises a first layer comprising titanium and a second layer comprising copper,
- wherein the second layer is over and in contact with the first layer,
- wherein the third insulating layer comprises a rounded portion,
- wherein the gate insulating layer comprises a first opening,
- wherein the second insulating layer comprises a second opening, and
- wherein the source electrode or the drain electrode is electrically connected to the semiconductor layer through the first opening and the second opening.
Dependencies are inferred from the claim text.