Method for producing at least one layer of a solid -based thin-film battery, plasma powder sprayer therefor, and solid-based thin film battery

A solid state thin-film battery (100) in which at least one layer (32) of said battery is manufactured from powder particles (48) by the method of A method for the manufacture of at least one layer (32) for solid state thin-film batteries (100) with the help of a plasma-powder-sprayer (1) with a plasma generation area (10) and with at least one mixing area (20) spatially separated from it, including the steps of:

• creation of a plasma gas stream (13) from an ignition gas stream (12) in the plasma generation area (10);
• creation of a powder-aerosol stream (44) from a carrier gas stream (41) from a carrier gas reservoir (42) and powder particles (48) from a powder reservoir (43), whereby the powder particles (48) are extracted under admixture of carrier gas (42) into the powder reservoir (43) in such a way that in the powder-aerosol stream (44) over and above an extraction time period, a constant mass flow dM/dt of powder particles (48) and a constant mixing ratio of powder particles (48) and carrier gas (42) is set;
• introduction of the powder-aerosol stream (44) and the plasma gas stream (13) into the at least one mixing area (20), so that a plasma-powder-aerosol (24) is formed;
• directing a plasma-powder-aerosol stream (34) from the at least one mixing area (20) onto a substrate (33) arranged in a coating area (30);
• and,
• deposition of a layer (32) on a substrate (33) of powder particles (48) that are superficially fused or changed in their crystalline structure in at least one mixing area (20) and/or in the plasma-powder-aerosol stream (34) and/or in the coating area (30).