Magnetic tunnel junction and method for fabricating a magnetic tunnel junction
AssigneeQUALCOMM Incorporated
InventorsXia LI, Kangho LEE, Wei-Chuan CHEN, Yu LU, Chando PARK, Seung Hyuk KANG
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AssigneeQUALCOMM Incorporated
InventorsXia LI, Kangho LEE, Wei-Chuan CHEN, Yu LU, Chando PARK, Seung Hyuk KANG
Estimating the term…
An improved magnetic tunnel junction device and methods for fabricating the improved magnetic tunnel junction device are provided. The provided two-etch process reduces etching damage and ablated material redeposition. In an example, provided is a method for fabricating a magnetic tunnel junction (MTJ). The method includes forming a buffer layer on a substrate, forming a bottom electrode on the substrate, forming a pin layer on the bottom electrode, forming a barrier layer on the pin layer, and forming a free layer on the barrier layer. A first etching includes etching the free layer, without etching the barrier layer, the pin layer, and the bottom electrode. The method also includes forming a top electrode on the free layer, as well as forming a hardmask layer on the top electrode. A second etching includes etching the hardmask layer; the top electrode layer, the barrier layer, the pin layer, and the bottom electrode.
A method for fabricating a device, comprising:
A non-transitory computer-readable medium configured to cause a lithographic device to perform a method for fabricating a magnetic tunnel junction, where the method comprises:
An apparatus, comprising:
A method for fabricating a magnetic tunnel junction, comprising:
Dependencies are inferred from the claim text.