Smooth seed layers with uniform crystalline texture for high perpendicular magnetic anisotropy materials
AssigneeQUALCOMM Incorporated
InventorsMatthias Georg GOTTWALD, Jimmy KAN, Kangho LEE, Chando PARK, Seung Hyuk KANG
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Abstract
A method for fabricating a perpendicular magnetic tunnel junction (pMTJ) device includes growing a seed layer on a first electrode of the pMTJ device. The seed layer has a uniform predetermined crystal orientation along a growth axis. The method also includes planarizing the seed layer while maintaining the uniform predetermined crystal orientation of the seed layer.
Claims26
A method of fabricating a perpendicular magnetic tunnel junction (pMTJ) device, comprising:
- growing a seed layer on a first electrode of the pMTJ device, the seed layer having a uniform predetermined crystal orientation at least along a growth axis;
- and
- planarizing the seed layer while maintaining the uniform predetermined crystal orientation of the seed layer.
A perpendicular magnetic tunnel junction (pMTJ) device, comprising:
- a seed layer on a first electrode of the pMTJ device, the seed layer having a uniform predetermined crystal orientation at least along a growth axis and a substantially planar surface;
- and
- a magnetic material on the substantially planar surface of the seed layer.
A method of fabricating a perpendicular magnetic tunnel junction (pMTJ) device, comprising the steps of:
- growing a seed layer on a first electrode of the pMTJ device, the seed layer having a uniform predetermined crystal orientation at least along a growth axis;
- and
- planarizing the seed layer while maintaining the uniform predetermined crystal orientation of the seed layer.
A perpendicular magnetic tunnel junction (pMTJ) device, comprising:
- a seed layer on a first electrode of the pMTJ device, the seed layer having a uniform predetermined crystal orientation at least along a growth axis and a substantially planar surface;
- and
- means for generating magnetic charge on the substantially planar surface of the seed layer.
Dependencies are inferred from the claim text.