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US 2015/0311426 A1Published application
Method of manufacturing a transducer
AssigneeNational Taiwan University
InventorsHong-Jie TSENG, Wei-Cheng TIAN, Wen-Jong WU
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Abstract
A method of manufacturing a tactile transducer includes providing a substrate; performing a surface treatment on the substrate by using an electrolysis system; depositing a buffer layer on the substrate; forming a layer of a piezoactive thin film on the substrate; baking the piezoactive thin film; annealing the piezoactive thin film; performing a poling process on the piezoactive thin film; and depositing a top electrode on the piezoactive thin film.
Claims18
A method of manufacturing a transducer, the method comprising the following steps:
- providing a substrate;
- performing a surface treatment on the substrate by using an electrolysis system;
- forming a layer of a piezoactive thin film on the substrate;
- baking the piezoactive thin film;
- and
- annealing the piezoactive thin film.
3 more elements
Dependencies are inferred from the claim text.