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US 2015/0311422 A1Published application
Suspended superconducting qubits
AssigneeInternational Business Machines Corporation
InventorsJosephine B. Chang, George A. Keefe, Chad T. Rigetti, Mary E. Rothwell
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Abstract
A qubit system includes a substrate layer, a qubit circuit suspended above the substrate layer and fine structure disposed between the qubit circuit and the substrate layer.
Claims11
A method of fabricating a qubit system, the method comprising:
- forming a qubit circuit on a substrate;
- and
- undercutting the substrate such that a fine structure remains suspending the qubit circuit above remaining substrate.
A method of fabricating a qubit system, the method comprising:
- forming a plurality of metallic anchors within a substrate;
- forming a qubit circuit on the substrate;
- and
- removing a portion of the substrate.
1 more element
Dependencies are inferred from the claim text.