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US 2015/0311378 A1Published application
Aluminum oxide passivation and damage removal for solar cells
AssigneeSolexel, Inc.
InventorsPawan Kapur, Anand Deshpande, Sean M. Seutter, Heather Deshazer, Virendra V. Rana, Solene Coutant, Swaroop Kommera, Mehrdad M. Moslehi
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Abstract
The present application provides effective and efficient structures and methods for the formation of solar cell base and emitter regions and passivation layers using laser processing. Laser absorbent passivation materials are formed on a solar cell substrate and patterned using laser ablation to form base and emitter regions. Laser damage to the solar cell substrate is removed using an etch.
Claims7
A method for processing a solar cell, comprising:
- depositing a doped laser absorbent passivation layer on the surface of a solar cell substrate, said doped laser absorbent passivation layer having a doping opposite said solar cell substrate;
- patterning said doped laser absorbent passivation layer using laser ablation;
- etching said solar cell substrate in said laser ablation pattern and removing a layer of said solar cell substrate;
- and
- annealing said solar cell to form diffused solar cell doped regions corresponding to said doped laser absorbent passivation layer.
2 more elements
Dependencies are inferred from the claim text.