Variable resistive memory device including vertical channel pmos transistor and method of manufacturing the same
AssigneeSK hynix Inc.
InventorNam Kyun PARK
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Abstract
A semiconductor device having a vertical channel, a variable resistive memory device including the same, and a method of manufacturing the same are provided. The semiconductor device having a vertical channel includes a vertical pillar formed on a semiconductor substrate and including an inner portion and an outer portion surrounding the inner portion, junction regions formed in the outer portion of the vertical pillar, and a gate formed to surround the vertical pillar. The inner portion of the vertical pillar has a lattice constant smaller than that of the outer portion of the vertical pillar.
Claims7
1-14. (canceled)
A method of manufacturing a semiconductor device, the method comprising:
- forming a first semiconductor layer on a semiconductor substrate, wherein the first semiconductor layer has a lattice constant smaller than that of the semiconductor substrate;
- patterning the first semiconductor layer and a portion of the semiconductor substrate to form a preliminary pillar;
- forming a second semiconductor layer having the same material as the semiconductor substrate, on an outer circumference of the preliminary pillar, to form a pillar;
- forming a drain in an upper portion of the pillar and a source in a lower portion of the pillar;
- and
- forming a gate to surround an outer circumference of the pillar.
Dependencies are inferred from the claim text.