Integrated circuits with resistor structures formed from gate metal and methods for fabricating same
AssigneeGlobalfoundries Inc.
InventorsAlexandru Romanescu, Gerd Zschätzsch, Christian Schippel
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AssigneeGlobalfoundries Inc.
InventorsAlexandru Romanescu, Gerd Zschätzsch, Christian Schippel
Estimating the term…
Integrated circuits having resistor structures formed from gate metal and methods for fabricating such integrated circuits are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a semiconductor substrate with a resistor area and a transistor area. The method deposits a gate metal over the resistor area and the transistor area of the semiconductor substrate, and the gate metal forms a gate metal layer in the resistor area. The method includes etching the gate metal to form a resistor structure from the gate metal layer in the resistor area. Further, the method includes forming contacts to the resistor structure in the resistor area.
A method for fabricating an integrated circuit, the method comprising:
A method for fabricating an integrated circuit, the method comprising:
An integrated circuit comprising:
Dependencies are inferred from the claim text.