Microbolometer contact systems and methods
AssigneeFLIR Systems, Inc.
InventorsEric A. Kurth, Patrick Franklin
Life of this patent
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Abstract
Systems and methods are directed to contacts for an infrared detector. For example, an infrared imaging device includes a substrate having a first metal layer and an infrared detector array coupled to the substrate via a plurality of contacts. Each contact includes for an embodiment a second metal layer formed on the first metal layer; a third metal layer formed on the second metal layer, wherein the third metal layer at least partially fills an inner portion of the contact; and a first passivation layer formed on the third metal layer.
Claims20
An infrared imaging device comprising:
- a substrate having a first metal layer;
- an infrared detector array coupled to the substrate via a plurality of contacts, wherein each contact comprises:
- a second metal layer formed on the first metal layer;
- a third metal layer formed on the second metal layer, wherein the third metal layer at least partially fills an inner portion of the contact;
- and
- a first passivation layer formed on the third metal layer.
A method of forming a contact on a substrate for an infrared detector array, the method comprising:
- applying a polyimide coating on the substrate;
- applying a passivation layer on the polyimide coating;
- applying a photoresist pattern on the passivation layer;
- etching to expose a first metal layer on the substrate;
- depositing a second metal layer on the first metal layer;
- applying a photoresist pattern on the second metal layer;
- and
- depositing a third metal layer on the second metal layer to at least partially fill an inner portion of the contact.
Dependencies are inferred from the claim text.