Display element manufacturing method and manufacturing apparatus
AssigneeNikon Corporation
InventorsTomohide HAMADA, Kei NARA
Life of this patent
Estimating the term…
Abstract
The display element manufacturing apparatus has a transporting part, which transports a substrate in a first direction, a first alignment system, which detects fiducial marks, a second alignment system, which is arranged at a prescribed distance from the first alignment system in the first direction and detects fiducial marks, calculating parts, which detect the fiducial marks and calculate the expansion/contraction of the substrate in the first direction or the transport speed of the substrate, and a processing part, which processes a prescribed position of the substrate based on at least one of the expansion/contraction of the substrate in the first direction or the transport speed of the substrate and the fiducial marks.
Claims8
1-14. (canceled)
A processing method of a long flexible sheet substrate, the method comprising;
- a transporting step which transports the flexible sheet substrate, where a plurality of fiducial marks are formed in a longitudinal direction at a predetermined interval, at a predetermined speed in the longitudinal direction with a rotating transport roller while causing the flexible sheet substrate to be in close contact with a surface of the transport roller over a predetermined angle;
- a detecting step which detects the fiducial marks with a first alignment system and a second alignment system of which visual fields are set in two locations respectively, the two locations being within a region where the flexible sheet substrate is in close contact with the transport roller and being separated from each other in the longitudinal direction at a predetermined distance;
- a calculating step which calculates a travel misalignment of the flexible sheet substrate in the longitudinal direction based on detection results of the first alignment system and the second alignment system;
- and
- a processing step which performs a process of the flexible sheet substrate with a processing apparatus based on the calculated travel misalignment.
Dependencies are inferred from the claim text.