Forming gate tie between abutting cells and resulting device
AssigneeGlobalfoundries Inc.
InventorsMahbub RASHED, Yunfei DENG, Juhan KIM, Jongwook KYE, Suresh VENKATESAN, Subramani KENGERI
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AssigneeGlobalfoundries Inc.
InventorsMahbub RASHED, Yunfei DENG, Juhan KIM, Jongwook KYE, Suresh VENKATESAN, Subramani KENGERI
Estimating the term…
Methods for forming abutting FinFET cells with a single dummy gate and continuous fins, and the resulting devices, are disclosed. Embodiments may include forming one or more continuous fins on a substrate, forming gates perpendicular to and over the one or more continuous fins to form a first FinFET cell and a second FinFET cell, and forming source and drain contact lines parallel to and between the gates, wherein a source contact line of the first FinFET cell is adjacent to a drain contact line of the second FinFET cell, and the source contact line and the drain contact line are on opposite sides of a gate.
A method comprising:
An apparatus comprising:
A method comprising:
An apparatus comprising:
Dependencies are inferred from the claim text.