Placement member and method of manufacturing the same
AssigneeKYOCERA Corporation
InventorMasahiko HORIUCHI
Life of this patent
Estimating the term…
Abstract
A placement member (1) in accordance with an embodiment of the present invention includes a base (4) having a placement section (3) on which an object (2) is placed, and a coating film (5) that coats at least a part of the placement section (3). The placement section (3) has a bottom face (8), a plurality of projections (9) projecting from the bottom face (8), and an annular protrusion (10) that protrudes from the bottom face (8) at the same height as the plurality of projections (9) and surrounds the plurality of projections (9). The coating film (5) has a first region (15) that coats top faces (11) of the projections (9) and a second region (16) that coats a top face (13) of the annular protrusion (10) and has a smaller thickness than that of the first region (15).
Claims10
A placement member comprising:
- a base including a placement section on which an object is placed;
- and
- a coating film that coats at least a part of the placement section, wherein
- the placement section has a bottom face, a plurality of projections protruding from the bottom face, and an annular protrusion that protrudes from the bottom face at the same height as the plurality of projections and surrounds the plurality of projections, and
- the coating film has a first region that coats top faces of the projections, and a second region that coats a top face of the annular protrusion and has a smaller thickness than that of the first region.
A placement member comprising:
- a base including a placement section on which an object is placed;
- and
- a coating film that coats at least a part of the placement section, wherein
- the placement section has a bottom face, a plurality of projections protruding from the bottom face, and an annular protrusion that protrudes from the bottom face at the same height as the plurality of projections and surrounds the plurality of projections, and
- the coating film has a first region that coats top faces of the projections, and allows a top face of the annular protrusion to be exposed.
A method of manufacturing a placement member, the method comprising:
- preparing a base including a placement section on which an object is placed, the placement section having a bottom face, a plurality of projections protruding from the bottom face, and an annular protrusion that surrounds the plurality of projections and protrudes from the bottom face at the same height as the plurality of projections;
- and
- forming a coating film having a first region that coats top faces of the projections,
- and a second region that coats a top face of the annular protrusion and has a smaller thickness than that of the first region on the placement section.
Dependencies are inferred from the claim text.