Substrate conveying system

A substrate conveying system comprising:

• a substrate supply unit including a storage case including a pair of side walls facing each other, and plural pairs of support elements provided on the side walls to support both end portions of plural substrates such that the plural substrates oriented horizontally are arranged to be vertically spaced apart from each other, and a down unit which moves the storage case down;
• a lift unit having one or more ejection holes which are provided as points or to extend in a conveying direction of the substrates, from at least a region between the pair of side walls of the storage case to a region which is other than the region between the pair of side walls, when viewed from a vertical direction, and eject a gas upward, the lift unit being configured to lift-up the substrate supported on the support elements by a pressure of the gas ejected through the one or more ejection holes, when the down unit moves the storage case down;
• and
• a conveying unit including a conveying member extending through the region between the pair of side walls of the storage case of the substrate supply unit and along the one or more ejection holes of the lift unit which are provided as points or to extend in the conveying direction, when viewed from the vertical direction, plural hook elements provided on the conveying member to extend upward such that the hook elements are arranged at intervals which are larger than a dimension of the substrate in the conveying direction, and a drive section for moving the conveying member in the conveying direction, the hook elements being configured to push in the conveying direction upstream end portions of the substrate in the conveying direction, in a state in which the substrate is lifted-up by the pressure of the gas ejected through the ejection holes.