Micro hybrid differential/triode ion pump

A method of manufacturing an ion pump comprising:

• positioning at least one electron source within the ion pump, the at least one electron source configured to emit electrons into the ion pump;
• positioning at least one cathode across the ion pump from the at least one electron source;
• positioning a high-voltage grid between the at least one electron source and the at least one cathode;
• wherein the high-voltage grid is configured to draw the electrons in between the at least one electron source and the at least one cathode where the electrons collide with gas molecules causing the gas molecules to ionize;
• and
• wherein the at least one cathode is configured to draw ionized gas molecules toward the at least one cathode such that the ionized gas molecules are trapped by or near the at least one cathode.

An ion pump open to a chamber on a first open side and configured to pump a volume of space in the chamber, the ion pump comprising:

• a first plane including at least a first electron source;
• a second plane including at least a second electron source, the second plane connected at a first right angle to the first plane;
• a third plane including at least a first cathode, the third plane connected at a second right angle to the second plane;
• a fourth plane including at least a second cathode, the fourth plane connected at a third right angle to the third plane;
• wherein the fourth plane is connected at a fourth right angle to the first plane such that the first plane is opposite the third plane, the second plane is opposite the fourth plane, and the first plane, the second plane, the third plane, and the fourth plane form sides of a box shape;
• a high-voltage grid positioned within the box shape, wherein the high-voltage grid is configured to draw the electrons in between at least one of the first electron source and the second electron source and at least one of the first cathode and the second cathode where the electrons collide with gas molecules causing the gas molecules to ionize;
• a Titanium array positioned between the at least one of the first cathode and the second cathode and the high-voltage grid, the Titanium array having periodic protrusions extending away from the at least one of the first cathode and the second cathode, wherein the periodic protrusions are coated by or made from Titanium;
• wherein the at least one of the first cathode and the second cathode are configured to draw ionized gas molecules toward the at least one cathode such that the ionized gas molecules are trapped by or near the at least one cathode;
• wherein a first ionized gas molecule of the ionized gas molecules strikes at least a first periodic protrusion of the periodic protrusions causing a first quantity of Titanium to sputter off the first periodic protrusion without causing the first ionized gas molecule to lose much momentum;
• wherein the first ionized gas molecule is trapped by or near the at least one cathode;
• and
• wherein the first quantity of Titanium buries previously embedded ionized gas molecules at or near the at least one cathode.