Charged Particle Beam Device, Sample Stage Unit, and Sample Observation Method

A sample stage unit used for a sample observation device, wherein

• the sample observation device includes:
• a first diaphragm allowing the primary charged particle beam to be transmitted thereby or pass therethrough;
• and
• the sample is observed using the sample observation device by
• irradiating the primary charged particle beam on the sample in a state that a space in which the sample is placed is isolated by the first diaphragm such that a pressure in the space is kept larger than a pressure inside the charged particle optical lens column,
• the sample stage unit comprising:
• a second diaphragm allowing the primary charged particle beam to be transmitted thereby or pass therethrough;
• a holding member holding the second diaphragm;
• a sample platform on which the holding member holding the second diaphragm is mounted, wherein
• the sample is held in a space formed, by the second diaphragm, the holding member, and the sample platform.

A sample observation method, comprising:

• a step of a primary charged particle beam being transmitted by or passing through, a first diaphragm, wherein
• the primary charged particle beam is radiated by a charged particle optical lens column ;
• and
• the first diaphragm isolates a space in which the sample is placed and a space inside the charged particle optical lens column from each other, such that a pressure in the space in which the sample is placed is kept larger than a pressure inside the charged particle optical lens column;
• a step of the primary charged particle beam that has been transmitted by or passed through the first diaphragm being transmitted by or passing through a second diaphragm;
• a step of the primary charged particle beam that has been transmitted by or passed through, the second diaphragm is irradiated, on the sample in contact with the second diaphragm;
• a step of detecting a signal generated from the sample on which the primary charged particle beam is irradiated.