Transmission Electron Microscope

Abstract

A transmission electron microscope (100) capable of reducing the effects of stray magnetic fields includes an electron beam source (2), an illumination lens system (4) for causing the electron beam to impinge on a sample (S), a sample stage (6) for holding the sample (S), a first objective lens (8), a second objective lens (10) disposed behind the first objective lens (8), an imaging lens system (16) disposed behind the second objective lens (10), and a controller (22) configured or programmed for controlling the first objective lens (8) and the second objective lens (10). The first objective lens (8) has upper and lower polepieces disposed on opposite sides of the sample (S). The upper and lower polepieces together produce a magnetic field. The controller (22) performs an operation for controlling the second objective lens (10) to construct a TEM (transmission electron microscope) image of the sample (S) out of the electron beam transmitted through the sample (S). Furthermore, the controller performs an operation for controlling the first objective lens (8) according to imaging conditions to produce a magnetic field that cancels out stray magnetic fields at the position where the sample (S) is placed.

Dependencies are inferred from the claim text.