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US 2015/0310992 A1Published application
Structure comprising multiple capacitors and methods for forming the structure
AssigneeMicron Technology, Inc.
InventorTae Heui Kwong
Life of this patent
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Abstract
Capacitors, apparatus including a capacitor, and methods for forming a capacitor are provided. One such capacitor may include a first conductor a second conductor above the first conductor, and a dielectric between the first conductor and the second conductor. The dielectric does not cover a portion of the first conductor; and the second conductor does not cover the portion of the first conductor not covered by the dielectric.
Claims9
A method for fabricating a capacitor, the method comprising:
- alternately stacking N planar conductors with N−1 dielectrics on a substrate to form a stacked body thereon, wherein N is a natural number greater than or equal to 2;
- removing a portion of the stacked body to uncover a respective portion of each of the planar conductors.
Dependencies are inferred from the claim text.