Layer by layer removal of graphene layers
AssigneeNational Tsing Hua University
InventorsWAN-CHEN CHEN, WEI-JEN HSU, PO-YUAN TENG, PO-WEN CHIU
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Abstract
A method for controllable layer-by-layer removal of graphene layers is provided. The method includes the steps of: disposing a single-layer or multi-layer graphene on a heat source, arranging graphene layer or layers in a sealed chamber filled with ozone gas, and removing a targeted area of graphene with a laser. The method provides low-temperature removal of graphene layer-by-layer. The heat source, laser, and the highly oxidizing ozone gas selectively control the removal of graphene layers.
Claims12
A method for controllable layer-by-layer removal of graphene layers, comprising the steps of:
- providing at least one layer of graphene;
- providing a highly graphene-oxidizing agent in a hermetic environment;
- providing a heating source for heating at least one graphene layer;
- and
- providing a power adjustable laser for defining a pre-determined removal pattern on the graphene layers and determining the laser power according to the difference between the targeted number of graphene layers and the number of graphene layers remained through a feedback loop controller.
Dependencies are inferred from the claim text.