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AssigneeApplied Materials Israel Ltd.
InventorsMichele Dalla-Torre, Gil Shabat, Adi Dafni, Amit Batikoff
Estimating the term…
An analysis system capable of classifying possible defects identified within an inspection image of an inspected object includes a storage device and a processor. The processor matches a template and a portion of the inspection image, thus giving rise to a matching portion of the inspection image. The inspection image is captured by an inspection tool. The processor associates, using a mask corresponding to the template and defining one or more segments within the matching portion of the inspection image, a potential defect with a segment defined by the mask and corresponding to a location of the potential defect, and classifies the potential defect in accordance with the segment defined by the mask within the matching portion of the inspection image and associated with the potential defect.
An analysis system capable of classifying possible defects identified within an inspection image of an inspected object, the system comprising:
A computerized method of classifying a potential defect identified within an inspection image of an inspected object, the method comprising:
A computer program product implemented on a non-transitory computer usable medium having computer readable program code embodied therein to cause a processor to perform a method of classifying a potential defect identified within an inspection image of an inspected object, the method comprising:
Dependencies are inferred from the claim text.