Substrate processing apparatus
AssigneeASM IP Holding B.V.
InventorTakashi WADA
Life of this patent
Estimating the term…
Abstract
A substrate processing apparatus includes a plurality of arms used for transferring a substrate, a plurality of processing sections for processing the substrate, a recipe storage section storing at least one recipe for designating at least one of the plurality of arms as a usable arm and at least one of the plurality of processing sections as a usable processing section and for specifying processing conditions in the usable processing section, and a control unit for, according to the at least one recipe, controlling the plurality of arms and the plurality of processing sections so that a substrate is transferred using the usable arm and is processed in the usable processing section under the processing conditions.
Claims6
A substrate processing apparatus comprising:
- a plurality of arms used for transferring a substrate;
- a plurality of processing sections for processing said substrate;
- a recipe storage section storing at least one recipe for designating at least one of said plurality of arms as a usable arm and at least one of said plurality of processing sections as a usable processing section and for specifying processing conditions in said usable processing section;
- and
- a control unit for, according to said at least one recipe, controlling said plurality of arms and said plurality of processing sections so that a substrate is transferred using said usable arm and is processed in said usable processing section under said processing conditions.
A substrate processing apparatus comprising:
- a plurality of arms used for transferring a substrate;
- a plurality of processing sections for processing said substrate;
- and
- a control unit for controlling movement of said plurality of arms and controlling processing in said plurality of processing sections,
- wherein said control unit is configured so that, using system parameters, at least one of said plurality of arms can be designated as a usable arm and at least one of said plurality of processing sections can be designated as a usable processing section.
Dependencies are inferred from the claim text.