Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

An exposure apparatus that exposes an object with an illumination light via a projection optical system and a liquid, the apparatus comprising:

• a local liquid immersion device that has a nozzle unit provided to surround an lower end part of the projection optical system and forms a liquid immersion area under the projection optical system with the liquid;
• a stage arranged below the nozzle unit, on which the object is mounted;
• a drive system having a motor to drive the stage;
• an alignment system that is arranged away from the projection optical system and detects a mark of the object;
• an encoder system having one of a grating section and a head provided at the stage and the other of the grating section and the head provided on an outer side of the nozzle unit with respect to the projection optical system, the encoder system measuring positional information of the stage by a plurality of the heads that face the grating section;
• and
• a controller coupled to the drive system, the controller controlling a movement of the stage while compensating for a measurement error of the encoder system that occurs due to the head, based on measurement information of the encoder system, wherein
• in each of a detection operation of the mark and an exposure operation of the object, the positional information of the stage is measured by the encoder system, and by a movement of the stage, one of the plurality of heads used in the measurement is switched to another head, and based on the positional information measured by the plurality of heads used before the switching, correction information to control the movement of the stage using the another head is obtained.

A method of making an exposure apparatus that exposes an object with an illumination light via a projection optical system and a liquid, the method comprising:

• providing a local liquid immersion device that has a nozzle unit provided to surround an lower end part of the projection optical system and forms a liquid immersion area under the projection optical system with the liquid;
• providing a stage arranged below the nozzle unit, on which the object is mounted;
• providing a drive system having a motor to drive the stage;
• providing an alignment system that is arranged away from the projection optical system and detects a mark of the object;
• providing an encoder system having one of a grating section and a head provided at the stage and the other of the grating section and the head provided on an outer side of the nozzle unit with respect to the projection optical system, the encoder system measuring positional information of the stage by a plurality of the heads that face the grating section;
• and
• providing a controller coupled to the drive system, the controller controlling a movement of the stage while compensating for a measurement error of the encoder system that occurs due to the head, based on measurement information of the encoder system, wherein
• in each of a detection operation of the mark and an exposure operation of the object, the positional information of the stage is measured by the encoder system, and
• by a movement of the stage, one of the plurality of heads used in the measurement is switched to another head, and based on the positional information measured by the plurality of heads used before the switching, correction information to control the movement of the stage using the another head is obtained.