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US 2015/0309306 A1Published application
Applications of contact-transfer printed membranes
AssigneeMassachusetts Institute of Technology
InventorsApoorva MURARKA, Vladimir BULOVIC, Annie I-Jen WANG, Jeffrey Hastings LANG
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Abstract
The disclosed embodiments provide sensitive pixel arrays formed using solvent-assisted or unassisted release processes. Exemplary devices include detectors arrays, tunable optical instruments, deflectable minors, digital micro-mirrors, digital light processing chips, tunable optical micro-cavity resonators, acoustic sensors, acoustic actuators, acoustic transducer devices and capacitive zipper actuators to name a few.
Claims23
A tunable optical device, comprising:
- a substrate defining an array of cavities with each cavity supporting an electrode;
- a reflective membrane formed over the substrate so as to form a plurality of diaphragms, each diaphragm corresponding to a respective one of the plurality of cavities and each diaphragm and corresponding electrode defining an electrode pair;
- power source for biasing a first electrode pair and a second electrode pair;
- wherein each of the first electrode pair and the second electrode pair deflects responsive to an applied bias thereby distorting reflection of an incident light.
1 more element
A tunable optical micromirror device, comprising:
- a diaphragm formed over a cavity and supported by a structure;
- a first electrode and a second electrode positioned in the cavity;
- a power supply for biasing each of the first electrode, the second electrode and the diaphragm;
- and
- a controller for controlling the power supply to bias one or more of the first electrode, the second electrode and the diaphragm;
- wherein the controller activates the first electrode or the second electrode, and wherein activating one of the first electrode or the second electrode deflects a region of the diaphragm.
3 more elements
Dependencies are inferred from the claim text.