Image generation apparatus and image generation method
AssigneeHamamatsu Photonics K.K.
InventorsTomonori NAKAMURA, Mitsunori NISHIZAWA
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Abstract
An image generation apparatus is an image generation apparatus that generates an image based on measurement light from the semiconductor device, and the image generation apparatus includes an optical sensor that detects the measurement light, an optical sensor power supply that applies a constant voltage to the optical sensor to supply a current to the optical sensor, a current detector that generates a pattern signal according to magnitude of the current supplied to the optical sensor by the optical sensor power supply, and a control device that generates a pattern image based on the pattern signal.
Claims13
An apparatus for generating an image based on light from the object, the apparatus comprising:
- a photodetector configured to detect the light;
- a power supply unit electrically coupling the photodetector and configured to apply a first constant voltage to the photodetector to supply a current to the photodetector;
- a signal generation unit electrically coupling the power supply unit and configured to generate a first signal according to magnitude of the current supplied to the photodetector by the power supply unit;
- and
- an image processer configured to generate a first image based on the first signal.
A method for generating an image based on light from the object, the method comprising:
- applying a first constant voltage to a photodetector configured to detect the light, to supply a current to the photodetector;
- generating a first signal according to magnitude of the current supplied to the photodetector;
- and
- generating a first image based on the first signal.
Dependencies are inferred from the claim text.