Inter-terminal capacitance measurement method for three-terminal device and apparatus for the same

A method of measuring an inter-terminal capacitance of a device under test including three terminals, having:

• a route selector including a first terminal connected to a high-side terminal of an LCR meter, a second terminal connected to a low-side terminal of the LCR meter, a third terminal connected to a guard terminal of the LCR meter, a fourth terminal for connecting to a first terminal of the device under test, a fifth terminal for connecting to a second terminal of the device under test, and a sixth terminal for connecting to a third terminal of the device under test, the fourth terminal to the sixth terminal being configured to connect to any of the first terminal to the third terminal;
• a first cable connected to the fourth terminal of the route selector;
• a second cable connected to the fifth terminal;
• and a third cable connected to the sixth terminal,
• the method comprising:
• carrying out, in order to acquire error impedances for routes to the respective terminals of the device under test, measurement for three connections of the route selector;
• carrying out, in order to acquire impedances of respective inter-terminal capacitances including errors of residual inductances for the device under test, measurement for the three connections of the route selector;
• and
• acquiring the respective inter-terminal capacitances of the device under test for which influences of the residual inductances are cancelled from measurement results obtained in the carrying out of the measurement in order to acquire the error impedances and in the carrying out of the measurement in order to acquire the impedances of the respective inter-terminal capacitances.