A sensor comprising a substrate
OwnerSteen Moellebjerg Matzeninventor
Life of this patent
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Abstract
A sensor (1) comprising an n-dosed/p-dosed substrate (2), and a Wheatstone bridge (3) arranged on the substrate (2) is disclosed. A field shield (4) is arranged on the substrate (2) in such a manner that the field shield (4) covers the Wheatstone bridge (3). A quasi-DC voltage is supplied to the Wheatstone bridge (3), and a DC voltage is supplied to the substrate (2), the level of said DC voltage being higher/lower than or equal to the quasi-DC voltage supplied to the Wheatstone bridge (3). A voltage may be supplied to the field shield (4), the level of said voltage being higher/lower than or equal to the quasi-DC voltage supplied to the Wheatstone bridge (3).
Claims20
A sensor comprising:
- an n-dosed substrate,
- measuring electronics arranged at least partly on the substrate, said measuring electronics comprising a Wheatstone bridge,
- a field shield arranged on the substrate in such a manner that the field shield covers the Wheatstone bridge,
- a power supply arranged to supply electrical voltage to the substrate and the measuring electronics, in such a manner that:
- a quasi-DC voltage is supplied to the Wheatstone bridge, and
- a DC voltage is supplied to the substrate, the level of said DC voltage being higher than or equal to the quasi-DC voltage supplied to the Wheatstone bridge.
A sensor comprising:
- a p-dosed substrate,
- measuring electronics arranged at least partly on the substrate, said measuring electronics comprising a Wheatstone bridge,
- a field shield arranged on the substrate in such a manner that the field shield covers the Wheatstone bridge,
- a power supply arranged to supply electrical voltage to the substrate and the measuring electronics, in such a manner that:
- a quasi-DC voltage is supplied to the Wheatstone bridge, and
- a DC voltage is supplied to the substrate, the level of said DC voltage being lower than or equal to the quasi-DC voltage supplied to the Wheatstone bridge.
Dependencies are inferred from the claim text.