Probe card

A probe card, comprising:

• a printed circuit board (PCB) comprising a plurality of conductive paths through a first surface and a second surface of the PCB;
• a substrate comprising a plurality of conductive paths through a first surface and a second surface of the substrate, wherein the conductive paths of the substrate and the corresponding conductive paths of the PCB are coupled between the first surface of the substrate and the second surface of the PCB;
• a plurality of probes, wherein the probes and the corresponding conductive paths of the substrate are coupled beyond the second surface of the substrate;
• an interposer layer comprising a plurality of conductive paths through a first surface and a second surface of the interposer layer, wherein the conductive paths of the interposer layer are coupled between the conductive paths penetrating through the second surface of the PCB to the corresponding conductive paths penetrating through the first surface of the substrate;
• and
• a plurality of first capacitive devices held by the interposer layer, and coupled between pairs of conductive paths in the interposer layer, respectively.

A probe card, comprising:

• a printed circuit board (PCB) comprising a pair of conductive paths through a first surface and a second surface of the PCB;
• a substrate comprising a pair of conductive paths through a first surface and a second surface of the substrate, wherein the conductive paths of the substrate and the corresponding conductive paths of the PCB are coupled between the first surface of the substrate and the second surface of the PCB;
• a pair of probes, wherein the probes and the corresponding conductive paths of the substrate are coupled beyond the second surface of the substrate;
• a probe head enclosing a space, wherein the probes penetrate through the space;
• and
• a first capacitive device held in the space, and coupled between the probes.