Multi-sensor optical device for detecting chemical species and manufacturing method thereof
AssigneeSTMicroelectronics S.r.l.
InventorsMassimo Cataldo MAZZILLO, Alfio RUSSO
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Abstract
An optical device for detecting a first chemical species and a second chemical species contained in a specimen, which includes: a first optical sensor, which may be optically coupled to an optical source through the specimen and is sensitive to radiation having a wavelength comprised in a first range of wavelengths; and a second optical sensor, which may be optically coupled to the optical source through the specimen and is sensitive to radiation having a wavelength comprised in a second range of wavelengths, different from the first range of wavelengths.
Claims22
An optical device, comprising:
- an optical source;
- a first optical sensor configured to be optically coupled to the optical source through a specimen, the specimen having a first chemical species and a second chemical species, the first optical sensor being sensitive to radiation having a wavelength in a first range of wavelengths;
- and
- a second optical sensor configured to be optically coupled to the optical source through the specimen, the second optical sensor being sensitive to radiation having a wavelength in a second range of wavelengths, different from the first range of wavelengths.
A method, comprising:
- manufacturing an optical device for detecting a first chemical species and a second chemical species in a specimen, the method including:
- forming a first optical sensor configured to be optically coupled to an optical source through the specimen, is the first optical sensor being sensitive to radiation having a wavelength in a first range of wavelengths;
- and
- forming a second optical sensor configured to be optically coupled to the optical source through the specimen, the second optical sensor being sensitive to radiation having a wavelength comprised in a second range of wavelengths, different from the first range of wavelengths.
A device, comprising:
- a substrate;
- a first optical sensor formed in the substrate, the first optical sensor being sensitive to radiation having a wavelength in a first range of wavelengths, the first optical sensor being configured to detect a first chemical species in a specimen;
- and
- a second optical sensor formed in the substrate adjacent to the first optical sensor, the second optical sensor being sensitive to radiation having a wavelength in a second range of wavelengths, different from the first range of wavelengths, the second optical sensor being configured to detect a second chemical species in the specimen.
Dependencies are inferred from the claim text.