Back to results
US 2015/0308887 A1Published application
Method of Vibration Measurement and Interferometer
AssigneeOptonor AS
InventorEiolf VIKHAGEN
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeOptonor AS
InventorEiolf VIKHAGEN
Estimating the term…
Method and system for measuring vibration in two or three directions in objects (12) by using three illumination light beams (11A-C) for measurement of in-plane vibrations in two directions, where one of the three illumination light beams (11A-C) is common for the two in-plane measurements, and where the three illumination light beams (11A-C) are configured to provide free space at one side of the object (12) for easier access to the object. The method and system is further arranged for using two illumination light beams (30A-B) for measuring vibrations in the object (12) in a third direction, which third direction is out-of-plane direction, where one illumination light beam (30A) is illuminating the object (12) through an imaging objective (16) and one illumination light beam (30B) is used as reference beam.
1-24. (canceled)
A method of measuring vibration in two in-plane directions, or two in-plane directions and one out-of-plane direction in objects (12) with an interferometer, comprising:
An interferometer for measuring vibration in two in-plane directions, or two in-plane directions and one out-of-plane direction in objects (12), comprising at least one illumination source arranged for emitting three in-plane illumination light beams (11A-C) for measurement of in-plane vibrations in two directions, wherein one of the three in-plane illumination light beams (11A-C) is common for the two directions of measurement, and the three illumination light beams (11A-C) are configured to provide free space at one side of the object (12).
Dependencies are inferred from the claim text.