Methods And Apparatus For MEMS Structure Release
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTai-I Yang, Ming-Tai Chung, Hong-Seng Shue, Ming-Yi Lin
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Abstract
An apparatus may include a vessel adapted to contain an organic solvent and a dehydration apparatus coupled with the vessel. The dehydration apparatus may be adapted to remove water from the organic solvent. The apparatus may further include a water content monitor coupled to the dehydration apparatus and the vessel, in which the water content monitor is adapted to determine a water content of the organic solvent. The apparatus may further include a wafer handler adapted to transfer at least one semiconductor wafer including a MEMS device into the vessel.
Claims20
An apparatus, comprising:
- a vessel adapted to contain an organic solvent;
- a dehydration apparatus coupled with the vessel, the dehydration apparatus adapted to remove water from the organic solvent;
- a water content monitor coupled to the dehydration apparatus and the vessel, the water content monitor adapted to determine a water content of the organic solvent;
- and
- a wafer handler adapted to transfer at least one semiconductor wafer including a MEMS device into the vessel.
An apparatus, comprising:
- a reactant vessel adapted to contain a solvent, the reactant vessel comprising an outflow portion and an inflow portion;
- a dehydration apparatus comprising an outflow portion and an inflow portion, wherein the outflow portion of the reactant vessel is coupled to the inflow portion of the dehydration apparatus, the dehydration apparatus adapted to remove water from the solvent;
- and
- a water content monitor comprising an outflow portion and an inflow portion, the water content monitor adapted to determine a water content of the solvent, wherein the outflow portion and the inflow portion of the water content monitor are coupled to the inflow portion of the reactant vessel and the outflow portion of the dehydration apparatus, respectively, and wherein the reactant vessel, the dehydration apparatus, and the water content monitor form a recirculation path of the solvent.
An apparatus, comprising:
- a vessel containing a solvent;
- a wafer cassette holding at least one semiconductor wafer including a MEMS device, the at least one semiconductor wafer immersed in the solvent;
- a dehydration apparatus coupled with the vessel, the dehydration apparatus adapted to remove water from the solvent;
- and
- a water content monitor coupled to the dehydration apparatus and the vessel, the water content monitor adapted to determine a water content of the solvent, wherein the vessel, the dehydration apparatus, and the water content monitor are in a recirculation path of the solvent.
Dependencies are inferred from the claim text.