Endpoint determination for capillary-assisted flow control
AssigneeEntegris, Inc.
InventorsJoseph D. Sweeney, Anthony M. Avila, Michael J. Wodjenski, Joseph R. Despres, Thomas H. Baum
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AssigneeEntegris, Inc.
InventorsJoseph D. Sweeney, Anthony M. Avila, Michael J. Wodjenski, Joseph R. Despres, Thomas H. Baum
Estimating the term…
Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluid-utilizing apparatus such as ion implanters.
An endpoint monitoring and control apparatus for a fluid supply vessel in which is disposed an array of capillary tubes arranged in parallel to one another, in a fluid flow path in the vessel including a vacuum actuated dispensing check valve and a discharge conduit, the vessel including a valve head to which the discharge conduit delivers fluid, the valve head containing a valve element that is translatable between fully open and fully closed valve positions, and a discharge port for dispensing fluid from the vessel, so that fluid in dispensing operation of the vessel flows through the flow path in the vessel through the array of capillary tubes, the vacuum actuated dispensing check valve and discharge conduit to the valve head to the discharge port, the endpoint monitoring and control apparatus comprising:
Dependencies are inferred from the claim text.