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US 2015/0308601 A1Published application
Vacuum-pipe connecting member for detecting gas leak
AssigneeSaramdle Co., Ltd.
InventorJae Hak Lee
Life of this patent
Estimating the term…
Abstract
The disclosed technology relates to a vacuum pipe connecting member and provides a vacuum pipe connecting member for detecting in real time a gas leak from a pipe connection between vacuum pipes. In one aspect, the vacuum pipe connecting member is provided to include: a clamp for connecting a vacuum pipe to another vacuum pipe or to a semiconductor manufacturing apparatus; and a reactant that is provided in the clamp and is chemically reactive to a gas leaking from the pipe connection.
Claims5
A vacuum pipe connecting member for detecting a gas leak, the vacuum pipe connecting member comprising:
- a clamp for connecting a vacuum pipe to another vacuum pipe or to a semiconductor manufacturing apparatus;
- and
- a reactant that is provided in the clamp and chemically reactive to a gas leaking from the pipe connection,
- wherein a coupling ring is formed in the clamp such that the coupling ring surrounds ends of pipes, has a slit formed in an outer surface of the coupling ring, and a storage portion filled with the reactant is provided in the slit.
1 more element
Dependencies are inferred from the claim text.