Instrumented Platform for Vibration-Sensitive Equipment
AssigneeNewport Corporation
InventorsVyacheslav Ryaboy, Warren Booth
Life of this patent
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Abstract
A platform that includes a vibration sensor located within an inner core of a table. The table may have a first plate that supports a vibration-sensitive payload. The first plate may be separated from a second plate by the inner core. The sensor can be located within the core directly below the device. The sensor can be connected to an electrical connector attached to an external surface of the table. A monitor can be readily plugged into the electrical connector to obtain vibration data from the sensor. The platform may also include a damper located within the inner core to reduce vibration of the table. The damper may be an active device that is connected to control circuits located within, or outside, the inner core.
Claims8
1-25. (canceled)
A platform assembly that supports a vibration-sensitive payload, comprising:
- a tabletop that includes a first plate coupled to the vibration-sensitive payload, a second plate, and an inner core located between the first plate and second plate;
- one or more vibration sensors positioned within the inner core of the tabletop;
- a controllable damper positioned within the inner core of the tabletop and in communication with the first plate and the sensors, the damper having an actuator configured to induce a vibration that offsets and cancels a vibration within the tabletop;
- and
- a control circuit in communication with the sensors and the damper, the control circuit configured to process a signal from the sensor and provide an excitation signal to the damper to generate an offsetting vibration that cancels tabletop vibration.
Dependencies are inferred from the claim text.