Substrate processing method

A substrate processing method comprising:

• dividing substrate holders into holder groups;
• dividing substrates into substrate groups according to processing purpose;
• assigning each one of the substrate groups to one of the holder groups;
• selecting a substrate holder for holding a substrate belonging to each substrate group from a holder group assigned to that substrate group;
• repeating the selecting of a substrate holder until the substrate holders are assigned to all of the substrates;
• performing a simulation of transporting the substrates and the substrate holders, while calculating a total transporting time from when processing of a first substrate is started to when processing of a final substrate is terminated;
• repeating the simulation and the calculating of a total transporting time while changing a transporting order of the substrates and the substrate holders;
• determining a transporting order that provides a shortest total transporting time;
• and
• transporting the substrates and the substrate holders according to the determined transporting order.