Methods and Apparatus for Forming Multi-Layer Structures Including Use of A Sacrificial Patternable Mold Material

A batch method for forming a plurality of three-dimensional structures simultaneously, comprising:

• (A) forming a plurality of successively formed layers, wherein each successive layer comprises at least two materials and is formed on and adhered to a previously formed layer, one of the at least two materials is a structural material and the other of the at least two materials is a sacrificial material, and wherein each successive layer defines a successive cross-section of the plurality of three-dimensional structures, and wherein the forming of each of the plurality of successive layers comprises:
• (i) depositing a first of the at least two materials;
• (ii) depositing a second of the at least two materials;
• (iii) planarizing the first and second materials to set a boundary level for the layer;
• and
• wherein the forming of a given one of the plurality of successively formed layers comprises:
• (i) applying a sacrificial material that is a 1st patternable mold material (PMM) to form part of the layer;
• (ii) patterning the 1st PMM to form a 1st pattern of sacrificial material;
• (iii) depositing a structural material in the 1st pattern;
• (iv) planarizing the sacrificial material and the structural material to set a boundary level for the given layer.
• (B) after the forming of the plurality of successive layers, separating at least a portion of the sacrificial material from multiple layers of the structural material to reveal the plurality of three-dimensional structures.